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Does "Eucentric focus from scope" distinguish between microprobe and nanoprobe?

Added by Zhiheng Yu almost 11 years ago

Hi Anchi,

As the eucentric focus of nanoprobe is typically slightly different from that in microprobe on an FEI microscope, I am wondering if the "eucentric focus from scope" button in Beam Tilt node distinguish between these two optical modes. This may be helpful if one uses nanoprobe for focus and exposure and microprobe for hole-mag eucentric height adjustment.

Thanks,

Zhiheng


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