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Feature #5912

closed

correct defocus change from beam-image shift

Added by Anchi Cheng over 6 years ago. Updated almost 6 years ago.

Status:
Closed
Priority:
Normal
Assignee:
Category:
-
Start date:
07/23/2018
Due date:
% Done:

0%

Estimated time:
Deliverable:

Description

The beam tilt induced by beam-image shift changes defocus. For very large (~5 um) shift, this becomes significant. This feature makes the correction along with beam tilt and objective stig.

Actions #1

Updated by Anchi Cheng almost 6 years ago

  • Status changed from New to Closed

This works but seems not to be as stable as stig and coma calibration. May be affected by flatness and goniometer value.

If the correction is not consistent, edit the calibration in "Beam Tilt" calibrator to

0, 0
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