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Feature #5912
closedcorrect defocus change from beam-image shift
Status:
Closed
Priority:
Normal
Assignee:
Category:
-
Target version:
Start date:
07/23/2018
Due date:
% Done:
0%
Estimated time:
Deliverable:
Description
The beam tilt induced by beam-image shift changes defocus. For very large (~5 um) shift, this becomes significant. This feature makes the correction along with beam tilt and objective stig.
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